Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/13472
Title: Plasma charging damage in deep sub-micron CMOS devices
Authors: TEO WEI YEE, JOCELYN
Keywords: MOS device, plasma charging damage, gate oxide, antenna, high density plasma, interconnect layer
Issue Date: 27-Oct-2003
Source: TEO WEI YEE, JOCELYN (2003-10-27). Plasma charging damage in deep sub-micron CMOS devices. ScholarBank@NUS Repository.
Abstract: Plasma charging damage is studied on 0.25 mm and 0.13 mm CMOS technology antenna devices. The enhancement of A. C. charging is observed in high density plasma (HDP) inter metal dielectrics (IMD) deposition for the first time. The plasma charging damage to the gate oxide layer was found to be drastically enhanced as metal area-intensive antenna is placed at higher interconnect layers. A charge sharing model is modified which can well quantitatively predict the plasma charging damage enhancement effect on the gate oxide. The dependence of charging damage on gate oxide thickness is also systematically studied and investigated. All observations can be well explained by existing theories in previous literature. Other than the change in Back-End-of-Line (BEOL) technology, gate oxide thickness change and the change in plasma tool are found to also play important roles in determining the severity of the charging damage.
URI: http://scholarbank.nus.edu.sg/handle/10635/13472
Appears in Collections:Master's Theses (Open)

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Title_Page_Thesis.pdf58.01 kBAdobe PDF

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A_Acknowledgement.pdf61.32 kBAdobe PDF

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B_Contents.pdf108.72 kBAdobe PDF

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C_Summary.pdf72.92 kBAdobe PDF

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E_List_Tables__Thesis.pdf64.97 kBAdobe PDF

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D_List_Figs__Thesis.pdf119.75 kBAdobe PDF

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Chapter_1__Introduction_Thesis.pdf93.85 kBAdobe PDF

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Chapter_2_GateOx_Rel_Thesis.pdf379.68 kBAdobe PDF

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Chapter_3_Exp_Setup_Thesis.pdf637.81 kBAdobe PDF

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Chapter_4_AC_Charging_Thesis.pdf431.35 kBAdobe PDF

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Chapter_5_DualGateOx_Thesis.pdf358.92 kBAdobe PDF

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Chapter_6_Cu_BEOL_Thesis.pdf724.2 kBAdobe PDF

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Chapter_7_Conclusion_Thesis.pdf82 kBAdobe PDF

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References.pdf143.43 kBAdobe PDF

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F_AuthorPublish_Thesis.pdf73.07 kBAdobe PDF

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