Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/134414
Title: FABRICATION OF ALL-SOLID-STATE THIN-FILM LITHIUM-ION MICROBATTERY
Authors: YE LIN THU
Keywords: Lithium-ion battery, Thin-film battery, Microbattery, LiCoO2 cathode, LiPON electrolyte, Si/Ge anode
Issue Date: 12-Aug-2016
Source: YE LIN THU (2016-08-12). FABRICATION OF ALL-SOLID-STATE THIN-FILM LITHIUM-ION MICROBATTERY. ScholarBank@NUS Repository.
Abstract: The objective of this study was to develop all-solid-state patterned thin-film microbatteries for use individually or in arrays in integrated circuits or in autonomous low energy microelectronic and microelectromechanical systems. Physical and electrochemical properties were studied as a function of variations in processing parameters. Lithium cobalt oxide (LiCoO2) was selected as the cathode material because of ease of synthesis and a relatively high theoretical charge capacity of 150 mAhg-1. Lithium phosphorous oxynitride (LiPON) was selected due to its adequate ionic conductivity (2x10-6 Scm-1) in the as-deposited amorphous state. Silicon (Si) and germanium (Ge) films were investigated as alloying anode materials due to their high volumetric capacities. The cyclability of Ge and Si was significantly improved when cycled after deposition of LiPON thin-films on top of them. With successful development of battery electrode materials, patterned full cells on silicon wafers were studied. The patterned microbatteries developed in this work were demonstrated to have comparable areal capacities per thickness of cathode material (~40 µAhcm-2µm-1) to commercially available thin-film discrete microbatteries.
URI: http://scholarbank.nus.edu.sg/handle/10635/134414
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