Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/130482
Title: Sputter process variables prediction via data mining
Authors: Ravi, V. 
Shalom, S.A.A.
Manickavel, A.
Issue Date: 2004
Source: Ravi, V., Shalom, S.A.A., Manickavel, A. (2004). Sputter process variables prediction via data mining. 2004 IEEE Conference on Cybernetics and Intelligent Systems : 256-261. ScholarBank@NUS Repository.
Abstract: Media manufacturing process plays a vital role in the Hard Disk Drive (HDD) Industry. Sputtering is an important process within the media manufacturing process that provides magnetic properties, which in turn affects the performance of the media in a HDD assembly. In this study, an attempt has been made to predict the critical magnetic characteristics and yield of the media, which in turn affects the overall product performance, by resorting to data mining technology. Feature selection was carried out using methods such as Principal Components Analysis (PCA), and weight information of Multi-Layer Feed-Forward Neural Networks (MLFF) and General Regression Neural Networks (GRNN). In addition, Classification And Regression Trees (CART) was used to generate rules to understand the dataset, as Neural Networks are considered as black boxes without rule extraction mechanism. A new hybrid architecture was also developed combining the top inputs identified by MLFF, GRNN and CART. It is concluded that models constructed using feature selection carried out by MLFF or GRNN performed very well. These models are preferred since they use the minimum number of input variables. Hence they are practically and economically more viable than other models with similar performance. The predictions have been validated using the 10-fold Cross validation method, to ensure that the results are not due to any anomaly in the dataset.
Source Title: 2004 IEEE Conference on Cybernetics and Intelligent Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/130482
ISBN: 0780386442
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

19
checked on Jan 20, 2018

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.