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https://doi.org/10.1063/1.4913299
Title: | Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry | Authors: | D'Costa, V.R. Yeo, Y.-C. |
Issue Date: | 2015 | Publisher: | American Institute of Physics Inc. | Citation: | D'Costa, V.R., Yeo, Y.-C. (2015). Probing the carrier concentration profiles in phosphorus-implanted germanium using infrared spectroscopic ellipsometry. Journal of Applied Physics 117 (7). ScholarBank@NUS Repository. https://doi.org/10.1063/1.4913299 | Source Title: | Journal of Applied Physics | URI: | http://scholarbank.nus.edu.sg/handle/10635/128146 | ISSN: | 00218979 | DOI: | 10.1063/1.4913299 |
Appears in Collections: | Staff Publications |
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