Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/123829
Title: DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
Authors: WANG TAO
Keywords: MEMS, Piezoelectric, Ultrasound, Sensor, Microelectronics
Issue Date: 18-Jan-2016
Citation: WANG TAO (2016-01-18). DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES. ScholarBank@NUS Repository.
Abstract: VARIETIES OF PIEZOELECTRIC MEMS DEVICES ARE DEVELOPED IN THIS THESIS. LEVERAGING ON THE PIEZOELECTRIC EFFECT, ACOUSTIC WAVE BASED MICRO RESONATORS ARE DEVELOPED AS THE SENSING ELEMENTS. A SURFACE ACOUSTIC WAVE (SAW) PRESSURE SENSOR FOR HARSH ENVIRONMENT APPLICATIONS IS DESIGN, FABRICATED AND CHARACTERIZED. EMPLOYING TWO UNIQUE MODES OF LAMB WAVE, A DECOUPLED VISCOSITY AND DENSITY SENSOR IS ALSO PROPOSED. THIS SENSOR CAN DIFFERENTIATE THE VISCOSITY FROM DENSITY, PROVIDING A MORE ACCURATE WAY OF CHEMICAL DETECTION. IN ADDITION TO THE ACOUSTIC WAVE SENSORS, PIEZOELECTRIC ULTRASONIC MICROMACHINED TRANSDUCERS (PMUTS) ARE DEVELOPED AS WELL. CONVENTIONAL PIEZOELECTRIC CERAMIC BASED ULTRASONIC TRANSDUCER SUFFERS SEVERAL INHERENT LIMITATIONS, E.G. ACOUSTIC IMPEDANCE MISMATCHING, POOR BANDWIDTH AND POOR SENSITIVITY. AIMING AT OVERCOMING THESE LIMITATIONS, THE MEMS BASED PMUT ARE WITH SEVERAL UNIQUE FEATURES SUCH AS HIGH EFFICIENCY, HIGH SENSITIVITY, ELECTRICALLY FREQUENCY SWITCHING AND ULTRA-WID
URI: http://scholarbank.nus.edu.sg/handle/10635/123829
Appears in Collections:Ph.D Theses (Open)

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