Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2749865
Title: Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography
Authors: Casse, B.D.F.
Moser, H.O. 
Lee, J.W.
Bahou, M. 
Inglis, S.
Jian, L.K. 
Issue Date: 2007
Citation: Casse, B.D.F., Moser, H.O., Lee, J.W., Bahou, M., Inglis, S., Jian, L.K. (2007). Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography. Applied Physics Letters 90 (25) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2749865
Abstract: Presently existing THz electromagnetic metamaterials were mostly produced as planar single layer structures, either deposited on a substrate or embedded in a polymer matrix, and patterned by a primary pattern generator such as an electron beam, writer or a laser writer. Some attempts to produce more voluminous structures were made using ultraviolet photolithography and a stacking process. We explore deep x-ray lithography and subsequent stacking of chips to fabricate, with good yield, substantial quantities of rod-split-ring structures that come closer to three dimensions than before. Samples were characterized layer-by-layer using Fourier transform interferometry in the far infrared. © 2007 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/116005
ISSN: 00036951
DOI: 10.1063/1.2749865
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