Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2006.03.170
Title: Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
Authors: Tan, S.K.
Liu, R. 
Sow, C.H. 
Wee, A.T.S. 
Keywords: InP
Ion beam sputtering
Nanodots
Issue Date: Jul-2006
Citation: Tan, S.K., Liu, R., Sow, C.H., Wee, A.T.S. (2006-07). Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 248 (1) : 83-89. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2006.03.170
Abstract: We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O2 + beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38° and 44° incidence with ion current density of 100 μA cm-2. At 56° and 62° incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In2O3 and various InP oxides; and is In2O3-rich due to the preferential sputtering of P atoms. © 2006 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/115927
ISSN: 0168583X
DOI: 10.1016/j.nimb.2006.03.170
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