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|Title:||A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication|
Semiconductor wafer fabrication system
|Source:||Hu, H., Zhen, L., Sun, Z., Zhang, H. (2013-07). A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication. International Journal of Advanced Manufacturing Technology 67 (1-4) : 111-120. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-013-4758-7|
|Abstract:||The performance of a wafer fabrication system is constrained by its bottlenecks, which is often affected by the system fluctuations and unpredicted events, e.g., machine breakdown. Considering the re-entrant process flow in wafer fabrication, we propose a scheduling method that divides the process flow into several stages and protects the bottleneck step at each re-entrant stage from the system fluctuations. Furthermore, due to the multiple bottlenecks in wafer fabrication system, we identify the bottlenecks by sensitivity analysis on machines' capacity. Then, during the real-time scheduling, the bottlenecks with stronger constraints are assigned with higher priority than the bottlenecks with weaker constraints. Finally, a set of simulation experiments are performed to validate the effectiveness of the proposed method. © 2013 Springer-Verlag London.|
|Source Title:||International Journal of Advanced Manufacturing Technology|
|Appears in Collections:||Staff Publications|
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