Please use this identifier to cite or link to this item:
|Title:||A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication|
Semiconductor wafer fabrication system
|Citation:||Hu, H., Zhen, L., Sun, Z., Zhang, H. (2013-07). A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication. International Journal of Advanced Manufacturing Technology 67 (1-4) : 111-120. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-013-4758-7|
|Abstract:||The performance of a wafer fabrication system is constrained by its bottlenecks, which is often affected by the system fluctuations and unpredicted events, e.g., machine breakdown. Considering the re-entrant process flow in wafer fabrication, we propose a scheduling method that divides the process flow into several stages and protects the bottleneck step at each re-entrant stage from the system fluctuations. Furthermore, due to the multiple bottlenecks in wafer fabrication system, we identify the bottlenecks by sensitivity analysis on machines' capacity. Then, during the real-time scheduling, the bottlenecks with stronger constraints are assigned with higher priority than the bottlenecks with weaker constraints. Finally, a set of simulation experiments are performed to validate the effectiveness of the proposed method. © 2013 Springer-Verlag London.|
|Source Title:||International Journal of Advanced Manufacturing Technology|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on May 20, 2018
checked on Mar 11, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.