Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0009-2614(03)00245-8
Title: Selective area growth of aligned carbon nanotubes by ion beam surface modification
Authors: Gohel, A.
Chin, K.C. 
Lim, K.Y.
Tay, S.T.
Liu, R. 
Chen, G.S.
Wee, A.T.S. 
Issue Date: 28-Mar-2003
Citation: Gohel, A., Chin, K.C., Lim, K.Y., Tay, S.T., Liu, R., Chen, G.S., Wee, A.T.S. (2003-03-28). Selective area growth of aligned carbon nanotubes by ion beam surface modification. Chemical Physics Letters 371 (1-2) : 131-135. ScholarBank@NUS Repository. https://doi.org/10.1016/S0009-2614(03)00245-8
Abstract: O 2 + ion beams are used to modify the surface of 50 nm thick Fe catalyst films deposited on Si(100) substrates to demonstrate selective area growth of aligned multiwall carbon nanotubes (MWNT). Aligned MWNTs were grown on the modified Fe/Si substrate using the hot filament plasma enhanced chemical vapor deposition (HF-PECVD) method. A higher growth rate and density of MWNTs was observed on the ion-modified areas, facilitating selective area growth of aligned MWNTs at temperatures as low as 560 °C. Deposition of graphitic sheets at the initial growth process on the unmodified areas inhibits the deposition of MWNTs. © 2003 Elsevier Science B.V. All rights reserved.
Source Title: Chemical Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/112647
ISSN: 00092614
DOI: 10.1016/S0009-2614(03)00245-8
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