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|Title:||Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures|
|Authors:||Yue, W. |
van Kan, J.A.
High aspect ratio
Proton beam writing
|Citation:||Yue, W., Ren, Y., van Kan, J.A., Chiam, S.-Y., Jian, L., Moser, H.O., Osipowicz, T., Watt, F. (2009-07-01). Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (14) : 2376-2380. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.103|
|Abstract:||We present an approach to fabricate tall high aspect ratio Au microstructures by means of proton beam direct writing. Combining proton beam direct writing and electroplating, we successfully produced gold structures with sub-micrometer lateral dimensions, structure heights in excess of 11 μm, and aspect ratios over 28. Sidewall quality of the Au structures was improved by lowering the process temperature to 20 °C when developing PMMA patterns with GG developer. The application of such structures as X-ray masks for deep X-ray lithography with synchrotron radiation was demonstrated. © 2009 Elsevier B.V. All rights reserved.|
|Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Appears in Collections:||Staff Publications|
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