Please use this identifier to cite or link to this item: https://doi.org/13/312
Title: Laser and thermal induced micro-structural changes and decomposition of hydrogenated carbon films
Authors: Zhang, L.H.
Wang, J.P.
Gong, H. 
Issue Date: 2-Apr-2001
Source: Zhang, L.H.,Wang, J.P.,Gong, H. (2001-04-02). Laser and thermal induced micro-structural changes and decomposition of hydrogenated carbon films. Journal of Physics Condensed Matter 13 (13) : 2989-2999. ScholarBank@NUS Repository. https://doi.org/13/312
Abstract: Micro-structural changes and decomposition of hydrogenated carbon films on magnetic disk substrates prepared by DC-magnetron sputtering were studied using Ar+ laser irradiation and physical heating in air and nitrogen ambience, respectively. It was found that a weak Ar+ laser of a fluence of 0.3 mW μm-2 could significantly decompose a-C:H films. The decomposition rate was fast initially and slowed down significantly after about 20 min. The decomposition rate of a-C:H increased with hydrogen concentration in the film. Raman light intensities of the irradiated sites reduced exponentially with irradiation time. Physical heating in air revealed that the oxidation-dominated decomposition took place between 320 and 350 °C within 15 min, and an increased hydrogen concentration made the a-C:H film more vulnerable to decomposition. At 150-300 °C, a phenomenon of nano-crystal graphite formation was observed from Raman spectra. XPS analysis indicated that there was no significant diffusion of carbon atoms into the substrate at 400 °C heating.
Source Title: Journal of Physics Condensed Matter
URI: http://scholarbank.nus.edu.sg/handle/10635/107086
ISSN: 09538984
DOI: 13/312
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